离化团束沉积是一种可在室温条件下获得高质量薄膜甚至单晶膜的沉积方法.本文对这种沉积方法的原理、装置及主要应用做了简要的介绍.由于沉积过程还存在大量未解决的问题,所以分子动力学模拟逐渐成为研究它们的有力手段.作者考察了近年来分子动力学模拟在这一领域的应用,着重介绍和讨论了模型的建立、势能及参数的选择,模拟存在的问题及今后工作的重点.
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