负衬底偏压热灯丝CVD金刚石膜成核的研究

1.重庆大学应用物理系,重庆,400044

2.重庆大学应用物理系,重庆,400044

3.重庆大学应用物理系,重庆,400044

4.重庆大学应用物理系,重庆,400044

5.重庆大学应用物理系,重庆,400044

基金项目: 中国科学院资助项目

Nucleation of Diamond by Biased Hot Filament Chemical Vapor Deposition

本文利用扫描电子显微镜和原子力显微镜研究了Si(100)衬底上热灯丝金刚石膜成核过程.在-240V和250mA下,在镜面抛光的Si(100)衬底上金刚石最大成核密度超过了1010cm-2.研究表明,负衬底偏压增强成核主要是发射电子和离子轰击的结果.

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