大直径直拉硅单晶炉热场的改造及数值模拟

1.河北工业大学半导体材料研究所,天津,300130

2.河北工业大学半导体材料研究所,天津,300130

3.河北工业大学半导体材料研究所,天津,300130

4.河北工业大学半导体材料研究所,天津,300130

基金项目: 中国科学院资助项目(69876011)

Improvement and Numeric Simulation for Heat Zone in Large-diameter Si Single Crystals Furnace

为了降低大直径硅单晶生长过程中氧的引入,对常规的406mm(16英寸)热场进行了改造.设计了以矮加热器为核心的复合式加热器系统,使晶体生长过程中熔体热对流减小.通过对热场的数值模拟计算,分析了热场的温度分布,发现熔体的纵向温度梯度下降,熔体热对流减小,硅单晶中氧含量降低.

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