利用能量为1.7MeV，注量分别为1013～1015/cm2的电子束辐照二氧化钒薄膜，对辐照及未辐照样品进行了UV-VIS、XPS参数测试，并测量900nm处光透射性能随温度的变化。发现电子辐照导致了VO2薄膜中的V离子价态由V4+向V5+转变，薄膜热致相变前后的光透射比随注量增加变化较小，只在注量为1014/cm2时光透射比减小得较明显；相变温度点及热滞回线宽度随注量增加出现显著变化。并对有关的结果进行了讨论。
VO2 thermochromatic thin films have been irradiated by electron beam with energy of 1.7MeV and flux from 1013/cm2 to 1015/cm2 .Un-irradiated and irradiated samples have been characterized by XPS and UV-VIS analysis.At the same time,the hysteresis characteristics of light changing with temperature at 900nm have been studied.The results show that a part of V4+ions change into V5+ after irradiated by electron beam and the transmittance properties have obvious variation before and after irradiation.The maximum change of transmittance during phase transition process is the sample irradiated by 1014/cm2 electron beam.The change of optical transmittance properties have been discussed .
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