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  4. 液相外延法制备LiNbO3薄膜的研究和进展

人工晶体学报, 2003, 32(3): 196-203. doi: 10.3969/j.issn.1000-985X.2003.03.004

液相外延法制备LiNbO3薄膜的研究和进展

王海丽 1, , 徐军 2, , 赵广军 3,

1.中国科学院上海光学精密机械研究所,上海,201800

2.中国科学院上海光学精密机械研究所,上海,201800

3.中国科学院上海光学精密机械研究所,上海,201800

关键词： 铌酸锂 , 薄膜 , 液相外延法

Research and Progress of LiNbO3 Thin Films Prepared by Liquid Phase Epitaxy

讨论了液相外延法制备LiNbO3薄膜过程中,衬底和助熔剂的选择对LiNbO3薄膜制备的影响及掺杂改性问题,简要地介绍了LiNbO3薄膜的一些性能及光学应用.研究表明,目前可用液相外延法在LiTaO3、掺镁(5mol%)的同成分LiNbO3及纯的同成分或近化学计量比LiNbO3单晶衬底上制备出具有较高光学质量的LiNbO3薄膜.讨论了液相外延法制备LiNbO3薄膜过程中存在的主要问题、发展前景及今后的研究方向.

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