采用螺旋波等离子体化学气相沉积 (HWP-CVD)技术在Si(100)和石英衬底上合成了具有纳米结构的碳化硅薄膜.通过X射线衍射(XRD)、傅立叶红外透射(FTIR)和原子力显微镜(AFM)等技术对所制备薄膜的结构、组分和形貌进行了分析,利用光致发光技术研究了样品的发光特性.分析表明,在700℃的衬底温度和1.33Pa的气压条件下所制备纳米SiC薄膜的平均颗粒度在3nm以下,红外透射谱主要表现为Si-C吸收.结果说明HWP-CVD为制备高质量纳米SiC薄膜的有效技术,所制备样品呈现出室温短波长可见发光特性,发光谱主峰位于395nm附近.
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