采用电弧离子镀方法,在Si(100)基底上分别在高纯Ar、高纯H2和C2H2的气氛下沉积类金刚石膜,利用激光Raman谱和X射线光电子能谱(XPS)对沉积膜的结构进行了分析.结果表明与在高纯H2和C2H2气氛下相比,在高纯Ar中沉积类金刚石膜Raman谱的ID/IG值最小,膜中sp3C含量最高为35.55%.纳米压痕仪测量结果表明不同气氛下沉积膜的硬度和弹性模量分别在16.7～34.8GPa和143.2～236.9GPa之间变化.在高纯Ar气氛下沉积膜的硬度和弹性模量最大分别为34.8GPa和236.9GPa.
参考文献
| [1] | Deshpandey C V;Bunshan R F .Diamond and Diamond Like Carbon: Deposition Process and Properties[J].Journal of Vacuum Science and Technology,1989,A7:2294. |
| [2] | Robertson J .Properties of Diamond-like Carbon[J].Surface and Coatings Technology,1992,50:185. |
| [3] | Robertson J. .Diamond-like amorphous carbon [Review][J].Materials Science & Engineering, R. Reports: A Review Journal,2002(4/6):129-281. |
| [4] | Q.Wei;J.Narayan .Superhard Diamondlike carbon: preparation, theory, and properties[J].International Materials Reviews,2000(4):133-164. |
| [5] | Tay BK.;Tan HS.;Yang HS.;Sun Z.;Shi X. .Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc[J].Surface & Coatings Technology,1998(1/2):155-158. |
| [6] | Amaratunga G A J;Silva S R P .Nitrogen Containing Hydrogenated Amorphous Carbon for Thin-film Field Emission Cathodes[J].Applied Physics Letters,1996,68:2529. |
| [7] | Ronkainen H;Koskinen J;Varjus S .Experimental Design and Modeling in the Investigation of Process Parameter Effects on the Tribological and Mechanical Properties of RF-plasma-deposited a-C:H Films[J].Surface and Coatings Technology,1999,122:150. |
| [8] | Fung M K;Chan W C;Lai K H et al.Deposition of Ultra-thin Diamond-like Carbon Properties Coating on Magnetic Disks by Electron Cyclotron Resonance Plasma Technique[J].Journal of Non-Crystalline Solids,1999,254:167. |
| [9] | Li Xiaodong;Bhushan B .Evaluation of Fracture Toughness of Ultra-thin Amorphous Carbon Coatings Deposited by Different Deposition Techniques[J].Thin Solid Films,1999,355-356:330. |
| [10] | Huang R F;Chan C Y;Lee C H et al.Wear-resistant Multilayered Diamond-like Carbon Coating Prepared by Pulse Biased Arc Ion Plating[J].Diamond and Related Materials,2001,10:1850. |
| [11] | 李刘合,夏立芳,孙明仁.真空阴极弧离子镀电弧特性及其电源选择[J].科技通报,1997(03):180-185. |
| [12] | Ayako Kimura;Yasushi Azuma;Tetsuya Suzuki;Tomohiro Saito;Yuichi Ikuhara .Microstructure of diamond-like carbon films prepared by cathodic arc deposition[J].Diamond and Related Materials,2002(7):1436-1440. |
| [13] | 李刘合;夏立芳;马欣新 等.真空阴极弧离子镀类金刚石碳(DLC)膜的碳弧稳定性研究[J].材料科学与工艺,1998,6(01):46. |
| [14] | Tamor M A;Vassell W C .Raman "Fingerprinting" of Amorphous Carbon Films[J].Journal of Applied Physics,1994,76:3823. |
| [15] | Schwan J.;Batori V.;Ehrhardt H.;Silva SRP.;Ulrich S. .RAMAN SPECTROSCOPY ON AMORPHOUS CARBON FILMS[J].Journal of Applied Physics,1996(1):440-447. |
| [16] | Merel P.;Chaker M.;Moisa S.;Margot J.;Tabbal M. .Direct evaluation of the sp(3) content in diamond-like-carbon films by XPS[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1998(1/2):105-110. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%