报道了我们在Li2B4O7、Sr3Ga2Ge4O14、LiNbO3、LiTaO3等声表面波用压电晶体材料方面的最新研究进展.采用改进型坩埚下降法成功生长了直径3～4英寸的Li2B4O7晶体,并实现了批量生产.作为硅酸镓镧系列新型压电晶体之一,Sr3Ga2Ge4O14晶体具有最大的压电系数.报道了直径2英寸Sr3Ga2Ge4O14晶体的生长结果,测试了该晶体的压电性能.在CO2(90%)、H2(10%)混合气氛中,分别在700℃和450℃下对LN和LT晶片进行化学还原处理,成功制备了3英寸LN和LT低静电黑片,不仅减少了器件制作工序,而且使成品率提高了5～8百分点.此外,在密封坩埚中生长了低静电LiNbO3晶体,观察到一些新的现象.
Recent developments of piezocrystals, Li2B4O7, Sr3Ga2Ge4O14, LiNbO3 and LiTaO3 in our laboratory were reported in this paper. Li2B4O7 single crystals of 3 to 4 inches in diameter have been grown successfully by the modified vertical Bridgman method and mass production of large size Li2B4O7 crystals has been realized. Sr3Ga2Ge4O14 (SGG) crystal is a novel piezoelectric crystal with the largest piezoelectric constants among the langasite family. Bridgman growth of SGG crystal up to 2 inches in diameter has been reported and its piezoelectric properties have been measured. In order to improve the yield of SAW devices, pyro-free LiNbO3 and LiTaO3 wafers were prepared by chemical reduction at 700℃ and 450℃ respectively under a mixed atmosphere of CO2 and H2. Bridgman growth of LiNbO3 crystals was also investigated and some new phenomena were observed.
参考文献
| [1] | Abe H;Saito H;Ohmura M;Yamada T, Miwa K.Lithium Tetraborate(Li2B4O7) SAW Resonators[A].New York USA,1987:91-94. |
| [2] | Robertson D S;Young I M .Growth and Growth Mechanism of Lithium Tetraborate[J].Journal of Materials Science,1982,17:1729-1738. |
| [3] | KATSUMATA T;Jonoura H;Imagawa H et al.Growth and Characterization of Li2B4O7 Single Crystals Grown by Novel Bridgman Technique Using a Graphite Container[J].Journal of Crystal Growth,1993,128:924-928. |
| [4] | Fan Shi-ji;Shen Guan-shun;Wang Wen;Li Jin-long, Le Xiu-hong .Bridgman Growth of Li2B4O7 Crystals[J].Journal of Crystal Growth,1990,99:811-813. |
| [5] | Fan Shiji;Wang Wen;Xiang Jianjun .Core-free Growth of Three Inch Diameter Li2B4O7 Crystal for SAW Devices[J].Crystal Properties and Preparation,1991,36-38:46-51. |
| [6] | Fan Shiji;Wang Wen;Xiang Jianjun;Xu Jiayue.The Development of Industrial Growth Technology of New Piezoelectric Crystal Li2B4O7[A].Hangzhou China,1992:206-209. |
| [7] | XU Jiayue;Fan Shiji;Lu Baoliang .Growth of φ4″ Li2B4O7 Single Crystals by Multi-crucible Bridgman Method[J].Journal of Crystal Growth,2004,264(1-3):260-264. |
| [8] | 武安华,徐家跃,周娟,范世(马山豆).硅酸镓镧结构的新型压电晶体的研究进展[J].硅酸盐学报,2003(05):480-484. |
| [9] | Kochurikhin VV.;Shimamura K.;Takagi H.;Fukuda T.;Kumatoriya M. .CZOCHRALSKI GROWTH OF SR3GA2GE4O14 SINGLE CRYSTALS FOR PIEZOELECTRIC APPLICATIONS[J].Journal of Crystal Growth,1997(4):452-454. |
| [10] | Juan Zhou;Jiayue Xu;Wangxiang Hua .Bridgman growth of new piezoelectric single crystal Sr_3Ga_2Ge_4O_(14)[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2004(2):213-217. |
| [11] | Standifer E M;Jundt D H;Norwood R G;Bordui P F.Chemically Reduced Lithium Niobate Single Crystals:Processing,Properties and Improvements in SAW Device Fabrication and Performance[A].Pasadena USA,1998:470-472. |
| [12] | CHEN Hongbing;Xia Haiping;Wang Jinhao;Zhang Jianli, Xu Jiayue , Fan Shiji .Bridgman Growth of LiNbO3 Single Crystal[J].Journal of Crystal Growth,2003,256(3-4):219-212. |
| [13] | 陆宝亮,徐家跃,范世(马山豆),夏宗仁.近化学计量比LiNbO3晶体的坩埚下降法生长[J].硅酸盐学报,2004(03):255-258. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%