利用微波等离子体化学气相沉积系统,以甲烷、氮气和氢气作为气源,在Si(100)衬底上成功地制备出了碳氮晶体薄膜,并对两种衬底温度下的薄膜性质进行了比较.用高分辨率场发射扫描电子显微镜观察薄膜,可以看出晶型完整,结构致密,结晶质量较好.X射线能谱证明了碳氮是以C-N和C=N共价键的形式存在,氮碳元素的原子比均为1.3.X射线衍射确定出在衬底温度为900410℃时薄膜样品的主要晶相成份是α-C3N4,β-C3N4,赝立方C3N4,立方C3N4和一个未知相(面间距d=0.4002nm),而在950±10℃时薄膜样品的主要晶相成份是α-C3N4,β-C3N4,赝立方C3N4,类石墨C3N4和一个未知相(面间距d=0.3984nm).喇曼光谱分析也证实了薄膜中主要存在α-C3N4,β-C3N4相.
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