本文集中报导了不同硅烷浓度条件下,制备的系列硅薄膜电学特性和结构特性的分析研究.结果表明:随着硅烷浓度的逐渐减小,材料逐渐地由非晶向微晶转变.傅立叶变换红外吸收(FTIR)的测试结果表明:微晶硅材料存在着自然的不稳定性,表现为氧含量随着时间的推移而增多.而且,微结构因子(IR)的结果给出:对于适用于电池有源层的微晶硅材料来说,其IR不能太大,也不能太小,本实验中相对好的微晶硅材料其IR为31%.
参考文献
| [1] | Rech B.;Roschek T.;Repmann T.;Muller J.;Schmitz R.;Appenzeller W. .Microcrystalline silicon for large area thin film solar cells[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):157-165. |
| [2] | Meier J.;Dubail S.;Kroll U.;Dubail J.;Golay S. Feitknecht L.;Torres P.;Fay S.;Fischer D.;Shah A.;Vallat-Sauvain E. .Microcrystalline/micromorph silicon thin-film solar cells prepared by VHF-CD technique[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2001(1/4):73-84. |
| [3] | Kepper H;Meier J;Torres P;Fischer D Shah A .[J].Journal of Applied Physiology,1999,A69:169-177. |
| [4] | 张晓丹,赵颖,朱锋,侯国付,魏长春,熊文娟,孙健,任慧志,耿新华,熊绍珍.VHF-PECVD低温高速生长的硅薄膜材料特性研究[J].光电子·激光,2004(05):507-511. |
| [5] | 杨恢东,吴春亚,黄君凯,麦耀华,张晓丹,薛俊明,任慧志,赵颖,耿新华,熊绍珍.VHF-PECVD法高速率沉积氢化微晶硅薄膜[J].太阳能学报,2004(02):127-132. |
| [6] | 张晓丹,赵颖,朱锋,魏长春,吴春亚,高艳涛,侯国付,孙建,耿新华,熊绍珍.VHF-PECVD低温制备微晶硅薄膜的拉曼散射光谱和光发射谱研究[J].物理学报,2005(01):445-449. |
| [7] | 杨恢东,吴春亚,朱锋,麦耀华,张晓丹,赵颖,耿新华,熊绍珍.射频辉光放电硅烷等离子体的光发射谱研究[J].光电子·激光,2003(04):375-379. |
| [8] | 张晓丹,朱锋,赵颖,侯国付,魏长春,孙建,张德坤,任慧志,薛俊明,耿新华,熊绍珍.气压对VHF-PECVD制备的μc-Si：H 薄膜特性影响的研究[J].人工晶体学报,2004(03):414-418. |
| [9] | Stability of microcrystalline silicon for thin film solar cell applications[J].IEE proceedings.Circuits, devices and systems,2003(4):300-308. |
| [10] | Shah A.;Meier J.;Vallat-Sauvain E.;Wyrsch N.;Kroll U.;Droz C.;Graf U. .Material and solar cell research in microcrystalline silicon[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2003(1/4):469-491. |
| [11] | Kroll U.;Torres P.;Pohl J.;Shah A.;Meier J. .From amorphous to microcrystalline silicon films prepared by hydrogen dilution using the VHF (70 MHz) GD technique[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,1998(Pt.A):68-72. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%