采用溶胶-凝胶工艺在Si(100)衬底上制备了Ba2 TiSi2O8(BTS)薄膜.通过XRD衍射、傅立叶红外(FT-IR)、拉曼(Raman)散射光谱和原子力显微镜(AFM)对薄膜的显微结构进行了表征.AFM分析显示,BTS薄膜表面光滑,晶粒尺寸在0.30~0.50μm.薄膜结构分析表明:随着退火温度的增加,BTS薄膜的结晶度增加,薄膜结构变得更加致密.同时,随着退火温度的升高,晶胞尺寸出现了收缩,导致了BTS薄膜的四方比c/a从0.613上升到0.618,将对薄膜的压电性能产生影响.
参考文献
[1] | KIMURA M;Fuino Y;Kawamura T .New Piezoelectric Crystal:Synthetic Fresnoite (Ba2TiSi2O8)[J].Applied Physics Letters,1967,29(04):227. |
[2] | Hausssuhl S;Ecksten J;Recker K .Sythesis and Physical Properties of Fresnoite, Ba2Si2TiO8[J].Zeitschrift für Kristallographie,1968,103:438-441. |
[3] | Yamauchi H;Yamashita K;Takauchi H .Ba2TiSi2O8 for Surface Wave Devices[J].Journal of Applied Physics,1979,50(05):3160. |
[4] | Gapalakrishnan J;Ramesha K;Rangan K K et al.In Search of Inorganic Nonlinear Optical Materials for Second Harmonic Generation[J].Journal of Solid State Chemistry,1999,148:75-80. |
[5] | ZhuMK;Yuan QX;SunSB.Study on Ba2TiSi2O8 and β-BaB2O4 Polar Glass Ceramics[A].Scientific Press:Beijing,2000:783-788. |
[6] | Blasse G .Fresnoite (Ba2TiSi2O8 ) - Luminescent Compound with a Long Decay Time[J].Inorganic and Nuclear Chemistry Letters,1979,5:639-641. |
[7] | Foster M.C.;Arbogast D.J.;Nielson R.M.;Photinos P.;Abrahams S.C. .Fresnoite: a new ferroelectric mineral[J].Journal of Applied Physics,1999(4):2299-0. |
[8] | Li Y;Chao B S;Yamanchi H .The Growth-kinetics of r. f. -sputtered Ba2 Si2 TiO8 Thin-films[J].Journal of Applied Physics,1992,71:4903-4909. |
[9] | Ding Y;Masuda N;Miura Y et al.Preparation of Polar Oriented Sr2TiSi2O8 Films by Surface Crystallization of Glass and Second Harmonic Generation[J].Journal of Non-Crystalline Solids,1996,203:88-92. |
[10] | Zhu M K;Yang Y H;Li X H et al.Preparation of Ba2 TiSi2 O8 Thin Films by Magnetron Sputtering[J].Microelectronic Engineering,2003,66:745-748. |
[11] | Mayerhofer Th G;Dunken H H .Single-crystal IR Spectroscopic Investigation on Fresnoite, Sr-fresnoite and Ge-fresnoite[J].Vibrational Spectroscopy,2001,25:185-192. |
[12] | Gabelicarobert M;Tarte P .Vibrational Spectrum of Fresnoite ( Ba2TiOSi2 O7 ) and Its Iso-structural Compound[J].Physics and Chemistry of Minerals,1981,7(01):26-30. |
[13] | Bunker Bruce C. .Raman Spectroscopic Studies of Silicotitanates[J].The journal of physical chemistry, B. Condensed matter, materials, surfaces, interfaces & biophysical,2000(34):8160-8169. |
[14] | Markgraf S A;Sharma S K;Bhalla A S.Raman Study of Fresnoite-type Materials:Polarized Single Crystal,Crystalline Powders and Glasses[J].Journal of Materials Research,1996(08):635-639. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%