利用VHF-PECVD分解硅烷和氢气的混合气体来制备本征微晶硅薄膜.运用拉曼散射和X射线衍射研究了不同硅烷浓度对薄膜的影响.随着硅烷浓度的增加,沉积速率和光敏性增加而晶化率下降.将优化的本征材料应用到pin电池中,得到本征层厚度约为1μm的微晶电池,效率达5.87%.
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