本文采用常压MOGVD方法在Ti/Si(111)模板上生长了氧化锌(ZnO)薄膜,使用二乙基锌为Zn源,去离子水为O源.Si衬底上的Ti薄层采用电子束蒸发台蒸发,然后低温生长缓冲层并在高温下进行重结晶,接着在680℃进行ZnO薄膜的生长.采用粉末衍射法、双晶X射线衍射及光致发光技术研究了材料的取向、结晶性能及发光性能.结果表明,本文制备了高度择优取向和良好发光性能的ZnO薄膜.
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