本文主要采用甚高频等离子体增强化学气相沉积技术制备了不同硅烷浓度、辉光功率和反应气体流量的单结微晶硅薄膜太阳电池.电池的Ⅰ-Ⅴ测试结果表明:电池的开路电压随功率的降低、硅烷浓度和气体流量的增加而增加,而对应的短路电流密度在一定的硅烷浓度条件下达到最大,填充因子也在逐渐的增加.文中对具体内容进行了详细的分析.
参考文献
| [1] | Stabler D L;Wrongski C R .Reversible Conductivity Changes in Discharge-produced Amorphous Si[J].Applied Physics Letters,1977,31:292. |
| [2] | Vetterl O.;Carius R.;Hapke P.;Houben L.;Kluth O.;Lambertz A.;Muck A.;Rech B.;Wagner H.;Finger F. .Intrinsic microcrystalline silicon: A new material for photovoltaics[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2000(1/2):97-108. |
| [3] | Wyrsch N;Droz C;Feitknecht L.Hydrogenated Microcrystalline Silicon:from Material to Solar Cells[A].,2000:1-11. |
| [4] | Shah A.;Meier J.;Vallat-Sauvain E.;Wyrsch N.;Kroll U.;Droz C.;Graf U. .Material and solar cell research in microcrystalline silicon[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2003(1/4):469-491. |
| [5] | 张晓丹,赵颖,高艳涛,朱锋,魏长春,孙建,王岩,耿新华,熊绍珍.甚高频等离子体增强化学气相沉积制备微晶硅太阳电池的研究[J].物理学报,2005(04):1899-1903. |
| [6] | 朱锋,周祯华,熊绍珍,吴春亚,李洪波,麦耀华,薛俊明,耿新华.复合绒面透明导电薄膜研究[J].太阳能学报,2003(03):344-347. |
| [7] | 张晓丹,高艳涛,赵颖,朱锋,魏长春,孙建,侯国付,薛俊明,张德坤,任慧志,耿新华,熊绍珍.VHF-PECVD制备不同氢稀释条件下硅薄膜特性分析[J].人工晶体学报,2005(01):56-59,64. |
| [8] | 张晓丹,赵颖,朱锋,魏长春,孙建,侯国付,薛俊明,耿新华,熊绍珍.辉光功率对VHF-PECVD制备的硅基薄膜特性的影响[J].人工晶体学报,2004(04):662-666. |
| [9] | Mai Y;Klein S.Microcrystalline Silicon Solar Cells Deposited at High Rates by Combination of VHF-PECVD and High Working Pressure[A].,2004 |
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