本文研究了750℃高温氨刻蚀对硅基铁纳米薄膜显微形态变化的影响.找到了纳米铁颗粒平均直径和平均分布密度随刻蚀时间、薄膜厚度等参数变化的规律,并对氨在其变化过程中的作用机制进行了初步探讨.研究发现: 5~10nm的薄膜原始厚度和8~12min的刻蚀时间是硅基铁纳米薄膜催化高定向碳纳米管阵列化学气相沉积生长的较理想条件.
参考文献
[1] | Collins P G;Zettl A .A Sample and Robust Electron Beam Source from Carbon Nanotubes[J].Applied Physics Letters,1996,69:1969-1971. |
[2] | Q. H. Wang;T. D. Corrigan;J. Y. Dai .Field emission from nanotube bundle emitters at low fields[J].Applied physics letters,1997(21/24):3308-3310. |
[3] | Fan S S;Chapline M G;Franklin N R;Tombler T W Cassell A M Dai H J .Self-oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties[J].Science,1999,283:512-514. |
[4] | Kuo C T;Lin C H;Lo A Y .Feasibility Studies of Magnetic Particle-embeded Carbon Nanotubes for Perpendicular Recording Media[J].Diamond and Related Materials,2003,12:799-805. |
[5] | Jong Hyung Choi;Tae Young Lee;Sun Hong Choi;Jae-Hee Han;Ji-Beom Yoo;Chong-Yun Park;Taewon Jung;SeGi Yu;Whikun Yi;In Taek Han;J.M. Kim .Density control of carbon nanotubes using NH_3 plasma treatment of Ni catalyst layer[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):318-323. |
[6] | Xizhang Wang;Zheng Hu;Qiang Wu;Xin Chen;Yi Chen .Synthesis of multi-walled carbon nanotubes by microwave plasma-enhanced chemical vapor deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(1/2):130-133. |
[7] | Mun Ja Kim;Jong Hyung Choi;Jong Bae Park;Seong Kyu Kim;Ji-Beom Yoo;Chong-Yun Park .Growth characteristics of carbon nanotubes via aluminum nanopore template on Si substrate using PECVD[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):312-317. |
[8] | Wang Guangfu;Zhang Huixing;Zhang Xiaoji;Wu Yuguang;Tian Renhe .A modified, filtered, pulsed cathodic vacuum arc implantation and deposition apparatus with the filtering duct working as a second anode[J].Surface & Coatings Technology,2000(0):470-473. |
[9] | M. H. Kuang;Z. L. Wang;X. D. Bai .Catalytically active nickel {110} surfaces in growth of carbon tubular structures[J].Applied physics letters,2000(10):1255-1257. |
[10] | Chris Bower;Otto Zhou;Wei Zhu .Nucleation and growth of carbon nanotubes by microwave plasma chemical vapor deposition[J].Applied physics letters,2000(17):2767-2769. |
[11] | Chhowalla M;Teo K B K;Ducati C et al.Growth Process Conditions of Aligned Carbon Nanotubes Using Plasma Enhanced Chemical Vapor Deposition[J].Journal of Applied Physics,2001,90:5308-5317. |
[12] | Teo K B K;Lee S B;Chhowalla M et al.Plasma Enhanced Chemical Vapor Deposition Carbon Nanotubes/nanofibers-how Uniform Do They Grow?[J].Nanotechnology,2003,14:204-211. |
[13] | Jae-Hee Han;Sun Hong Choi;Tae Young Lee .Growth characteristics of carbon nanotubes using platinum catalyst by plasma enhanced chemical vapor deposition[J].Diamond and Related Materials,2003(3/7):878-883. |
[14] | E. G. Wang;Z. G. Guo;J. Ma .Optical emission spectroscopy study of the influence of nitrogen on carbon nanotube growth[J].Carbon: An International Journal Sponsored by the American Carbon Society,2003(9):1827-1831. |
[15] | Zheng R T;Cheng G A;Peng Y B;Zhao Y Liu H P Liang C L .Synthesis of Vertically Aligned Carbon Nanotube Arrays on Silicon Substrates[J].Sciences in China(Series E),2004,47:616-624. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%