制作压电器件氧化锌单晶的评述

人工晶体学报, 2006, 35(3): 529-500. doi: 10.3969/j.issn.1000-985X.2006.03.022

制作压电器件氧化锌单晶的评述

尹利君 ^1, , 李法荟 ^2, , 王晓刚 ^3, , 余明清 ^4, , 张联盟 ^5,

1.武汉理工大学国家材料复合新技术国家重点实验室,武汉,430070;烁光特晶科技有限公司,北京,100018

2.烁光特晶科技有限公司,北京,100018

3.烁光特晶科技有限公司,北京,100018

4.武汉理工大学国家材料复合新技术国家重点实验室,武汉,430070

5.武汉理工大学国家材料复合新技术国家重点实验室,武汉,430070

关键词： ZnO , 单晶生长 , 压电器件

Comments on ZnO Bulk Single Crystals Used in Piezoelectric Devices

Keywords： ZnO , single crystal growth , piezoelectric devices

氧化锌材料制作压电器件已经有很长的研究历史,自从Robert F.Service在1997年报道氧化锌可以在短波长范围实现蓝光输出后,氧化锌单晶在质量和体积方面取得了很大的研究进展.通过对比分析20世纪60年代以来氧化锌单晶压电特性的研究结果,指出迄今为止制作压电器件的氧化锌单晶仍然需要继续优化.

ZnO material has a long history in the application of piezoelectric devices. There has been great progress in the volume and quality of single crystal ZnO since Robert F. Service notified that ZnO promised to realize the blue light output in the short wavelength in 1997. Generalizing from the researches into the piezoelectric characteristics of single crystal ZnO since the 1960' s, the results indicate that the future of ZnO crystals used in the piezoelectric devices should be optimistic further.

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