锆钛酸铅镧(Pb1-xLax(Zr1-yTiy)1-x/4O3)铁电材料是一种具有优越铁电、介电、压电和热释电性能的材料,在微电子领域有着广泛的应用前景.本文概括介绍了Pb1-xLax(Zr1-yTiy)1-x/4O3薄膜的研究意义、基本结构、制备方法、研究现状和应用展望;并对现阶段薄膜研究过程中的一些问题做了简要叙述.
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