对比了CZT晶片经腐蚀与钝化表面处理的PL谱,结果表明NH4F/H2O2作为CZT晶体表面钝化剂,钝化后CZT晶体表面陷阱态密度减小到最低程度,同时减小了与Cd空位复合有关的深能级杂质浓度.用Agilent 4339B高阻仪进行CZT晶片I-V特性测试以及Agilent 4294A高精度阻抗分析仪进行CZT晶片的C-V特性测试,结果表明钝化均能不同程度提高Au/p-CZT接触的势垒高度,减小了漏电流.主要原因是在CZT表面钝化生成的TeO2氧化层增加接触势垒高度,并减小了电荷因隧道效应而穿过氧化层的几率.
参考文献
[1] | Arnold Burger et al.Cadmium Zinc Telluride High Resolution Detector Technology[J].Spie,1998,3446:154. |
[2] | Verger L;Bonnefoy J P;Glasser F et al.New Developments in CdTe and CdZnTe Detectors for X and γ-ray Applications[J].Journal of Electronic Materials,1997,26(06):738. |
[3] | Nemirovsky Y;Ruzin A;Asa G et al.Study of Contacts to CdZnTe Radiation Detectors[J].Journal of Electronic Materials,1997,26(06):756. |
[4] | Wright G W;James R B;Chinn D et al.Evalution of NH4F/H2O2 Effectiveness as a Surface Passivation Agent for Cd1-xZnxTe[J].Spie,2000,4141:324. |
[5] | Rzepka E.;Riviere A.;Aoudia A.;Marfaing Y.;Triboulet R.;Lusson A. .DEFECTS STUDY BY PHOTOLUMINESCENCE AND CATHODOLUMINESCENCE IN VANADIUM DOPED CDZNTE[J].Journal of Crystal Growth,1996(1/4):286-291. |
[6] | Oettinger K;Hofmann D M;Efros A L et al.Excitonic Line Broadening in Bulk Grown Cd1-xZnxTe[J].Journal of Applied Physics,1992,71:4523. |
[7] | Lee J.;Rajavel D.;Summers CJ.;Giles NC. .DONOR-ACCEPTOR PAIR LUMINESCENCE INVOLVING THE IODINE A CENTER IN CDTE[J].Journal of Applied Physics,1995(9):5669-5674. |
[8] | Young-Hun Kim;Se-young An;Ju-Young Lee et al.Photoluminescence Study on the Effects of the Surface of CdTe by Surface Passivation[J].Journal of Applied Physics,1999,85:7370. |
[9] | Hu B;Yin A;Karczewski G et al.An Optical Method for Evaluation of the Net Acceptor Concentration in p-type ZnSe[J].Journal of Applied Physics,1993,74:4153. |
[10] | 刘恩科;朱秉升;罗晋生.半导体物理学[M].北京:国防工业出版社,1994:178. |
[11] | 施敏;黄振岗.半导体物理学[M].北京:电子工业出版社,1987:194. |
[12] | Amanullsh F M .Effect of Isochronal Annealing on CdTe and the Study of Electrical Properties of Au-CdTe Schottky Devices[J].Canadian Journal of Physics,2003,81(03):617. |
[13] | Frank F Wang;Alan L;Bube R H .Properties of Metal-semiconductor and Metal-insulator-semiconductor Junctions on CdTe Single Crystals[J].Journal of Applied Physics,1989,65(09):3552. |
[14] | Wang F F;Fahrenbruch A L;Bube R H .Properties of Metal-semiconductor and Metal-insulator-semiconductor Junctions on CdTe Single Crystals[J].Journal of Applied Physics,1989,65(09):3552. |
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