采用ZnCl2·2H2O在常压下高温水解反应生长ZnO晶体,反应温度为500℃.当以SiC为衬底时,可以获得六棱柱形氧化锌晶体,直径约为10μm,长为30～100 μm.当衬底为蓝宝石时,氧化锌沿[0001]呈定向柱状生长,柱的直径为5～10 μm,柱之间具有较多的内部缺陷.当以ZnO为衬底时,在{0001}面,形成连续膜,表面扫描电镜分析表明,晶体具有明显的极性生长特征,[0001]方向呈螺旋柱状生长.在{0001}面,晶体的平整性较好,呈现台阶性生长.
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