MgB2超导薄膜的化学气相沉积

物理测试, 2003, (4): 3-5. doi: 10.3969/j.issn.1001-0777.2003.04.002

MgB2超导薄膜的化学气相沉积

迟振华 ^1, , 王天生 ^2, , 漆汉宏 ^3, , 于栋利 ^4, , 何巨龙 ^5, , 刘世民 ^6, , 田永君 ^7, , 李东春 ^8,

1.燕山大学

2.燕山大学

3.燕山大学

4.燕山大学

5.燕山大学

6.燕山大学

7.燕山大学

8.燕山大学

基金项目: 国家自然科学基金(50171058)

关键词：二硼化镁 , 超导薄膜 , 化学气相沉积 , 原位

CHEMICAL VAPOR DEPOSITION OF SUPERCONDUCTING MgB2 THIN FILM

探索了采用化学气相沉积法,在LaAlO3单晶基片上原位制备了MgB2超导薄膜.X射线衍射(XRD)分析表明薄膜的相纯度不理想,扫描电子显微镜(SEM)观察表明薄膜的表面比较粗糙,用标准四引线法测得薄膜的起始转变温度(TConset)为30 K,零电阻温度(TCO)为18 K.

参考文献

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