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采用等离子体化学气相沉积(PCVD)法,在0.1~0.3mm厚的普通硅钢片表面涂硅,再进行短时间高温扩散,使硅钢片的含Si量增加到6.5%,铁损P10/50比原来钢片降低50%,其他磁性能也大有改善。试验结果表明,在460~600℃涂硅,其他条件不变,涂硅速度随温度升高而降低,并对等离子体反应的动力学和热力学进行了研究。

Silicon depositing was carried out on 0. 1 ~ 0. 3 mm thick silicon steel sheet by plasma chemical vapor depositing process. The surface silicon content of the sheet could reach 6. 5 % Si after high temperature diffusion treatment and iron loss was 50% smaller than that of the non-treated silicon steel sheet. It was shown that the silicon deposition rate decreased with the temperature increasing. Accordingly the plasma reaction dynamics was comprehensively discussed by the authors.

参考文献

[1] 何忠治.电工钢[M].北京:冶金工业出版社,1997
[2] 王向成.国外钢铁技术译文集(高硅钢专辑)[M].武汉:武钢科技情报所,1993
[3] 小昭光睛.等离子体成膜基础[M].北京:国防工业出版社,1994
[4] Kumaska N .Impurity doping in chemically vapor-deposited amorphous hydrogenated silicon from desilane[J].Journal of Applied Physiology,1984,55(06):1425.
[5] 陈大凯;周孝重.等离子体热处理技术[M].北京:机械工业出版社,1990
[6] 钟太杉;陈国良 .Fe3Si合金的制备及应用研究进展[J].功能材料,1999,30(04):337.
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