透明导电薄膜在不同衬底上的性能对比研究

材料保护, 2005, 38(7): 5-7. doi: 10.3969/j.issn.1001-1560.2005.07.002

透明导电薄膜在不同衬底上的性能对比研究

陆峰 ^1, , 徐成海 ^2, , 闻立时 ^3, , 曹洪涛 ^4, , 裴志亮 ^5, , 孙超 ^6,

1.沈阳建筑大学交通与机械工程学院,辽宁,沈阳,110168;东北大学机械工程与自动化学院,辽宁,沈阳,110004

2.东北大学机械工程与自动化学院,辽宁,沈阳,110004

3.中国科学院金属研究所,辽宁,沈阳,110015

4.中国科学院金属研究所,辽宁,沈阳,110015

5.中国科学院金属研究所,辽宁,沈阳,110015

6.中国科学院金属研究所,辽宁,沈阳,110015

基金项目: 国家自然科学基金(50172051) 东北大学校科研和教改项目(874003)

关键词： ZAO薄膜 , 衬底 , 直流磁控溅射 , 性能 , XRD衍射分析 , 电阻率 , 透射率

Comparison of Performance of Transparent Conducting ZnO:Al(ZAO) Thin Films on Transparent Glass and Organic Plastic Substrates

为了对比研究不同透明衬底上ZnO:Al(ZAO)薄膜的性能,采用直流反应溅射法制备薄膜,并对其作EDS、XRD和电学测试分析.结果表明:所制备的ZAO薄膜具有典型的ZnO晶体结构;沉积在玻璃基片上的ZAO薄膜,Al,O含量高于沉积在透明聚酯塑料基片上的,而Zn的含量则相反;在两种衬底上获得的ZAO薄膜电阻率分别为4.5×10-4Ω*cm和9.73×10-4Ω*cm,可见光透射率分别达到87.7%和81.5%.由此可见:用直流反应磁控溅射法在不同衬底上都能获得可见光透射率达到80%以上的ZAO薄膜;相比而言,在玻璃衬底上获得的ZAO薄膜电阻率低,而在透明聚酯塑料上沉积的ZAO薄膜透射性好.

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