本文综述了碳热还原反应制备AlN的各种反应机制,并进行了评述,详述了气-固反应机制和固-固反应机制的特点、实验证据及存在的不足.认为Al2O3蒸发分解零级反应与固相扩散反应共存的机理能较好地解释目前的实验现象,但仍需进行完善.
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