本文通过在SiO2溶胶中掺入聚乙二醇(PEG)或同时掺入PEG和聚硅氧烷,研究了改性后SiO2增透膜的性能.结果表明掺入PEG仅提高了薄膜的激光损伤阈值,而同时掺入PEG和聚硅烷不仅提高了薄膜的激光损伤阈值,还极大地提高了膜层的抗机械损伤能力,延长了薄膜的使用寿命,达到了改善薄膜性能的目的.
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