利用融盐热歧化反应进行了氮化铝陶瓷表面钛金属化沉积的动力学研究.结果表明,氮化铝陶瓷表面钛膜的厚度随着反应温度和反应时间的增加而增加,膜的厚度与反应时间成很好的线性关系,沉积速率与融盐中K2TiF6的起始浓度成线性关系,沉积过程是受融盐与氮化铝陶瓷基体之间的界面反应控制.其沉积过程的活化能为130kJ/mol.
参考文献
| [1] | 鲁燕萍,高陇桥.AlN陶瓷的薄膜金属化及其与金属的焊接研究[J].真空科学与技术学报,2000(03):190. |
| [2] | 秦明礼;曲选辉;黄栋生 .氮化铝(AlN)陶瓷的特性、制备及应用[J].陶瓷工程,2000,8:39-42. |
| [3] | 高能武,陆吟泉,秦跃利,吴云海.AlN基片的薄膜金属化[J].电子元件与材料,1999(05):22-23. |
| [4] | Nicholas M G;Mortimer D A;Jones L M.Some observations on the wetting and bonding of nitride ceramics[J].Journal of Materials Science,1990(25):2679-2689. |
| [5] | Jian Chen .Interfacial structures and reactions between metallized titanium coating and Si3N4 substrates[J].Materials Letters,1998(1/2):90-94. |
| [6] | Jian Chen;Pan Wei;Weiming Wang;Qiliang Huang;Yong Huang .Metallization of Si3N4 surface by molten salt reaction[J].Journal of Materials Science Letters,1997(9):745-746. |
| [7] | 黄奇良,潘伟,胡忠.氮化铝陶瓷表面钛金属化的研究[J].材料导报,2002(02):66-68. |
| [8] | Pan Wei;Huang Qiliang;Chen Jian et al.Mechanism of titanium deposition on Al2O3 ceramic surface by molten salt reaction[J].Materials Letters,1997,31:317-320. |
| [9] | Pan Wei;Wang Cai;Huang Yong.Metallic film deposition on Si3N4 ceramics by molten salt reactions[A].Singapore:World Scientific Press,1995:710-714. |
| [10] | Carter W B;Papageorge M V .Titanium and tantanium coatings on aluminum nitride[J].Journal of Vacuum Science and Technology,1992,10(06):3460-3464. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%