采用物理气相沉积法,以纯铟粒为原料,在980℃下Si(100)基片上通过改变气流成分制备了一系列氧化铟纳米线,并采用扫描电子显微镜、X射线衍射和透射电子显微镜对其形貌和结构进行了表征.试验表明,随着氩气中氢气含量增加,纳米线的产量降低,10%的含氢量最优.纳米线的直径在50～100nm之间,长度可达几十微米.纳米线的结构是方铁锰矿体心立方单晶结构.纳米线的生长符合VLS模型,铟起到了自催化的作用.
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