综述了TCO薄膜的研究进展和应用前景.ITO薄膜是目前应用最广泛的薄膜,AZO薄膜是研究的热点,具有替代ITO薄膜的潜能.TCO薄膜因具有优异的光电性能而被应用在各种光电器件中,例如,平面液晶显示器,太阳能电池等.随着TCO薄膜制备方法的不断改进、成熟以及聚合物基TCO薄膜的开发,TCO薄膜将具有更广阔的应用和发展空间.
参考文献
| [1] | 赵谢群.透明导电氧化物薄膜研究现状与产业化进展[J].电子元件与材料,2000(01):40-41. |
| [2] | 韩雪;夏慧;吴丽君 .透明导电膜及靶材[J].电子元件与材料,1998,2:31. |
| [3] | 姜燮昌,原勇.ITO膜透明导电玻璃的应用前景及工业化生产[J].真空,1995(06):1. |
| [4] | 张德恒 .透明导电膜中光吸收边的移动[J].半导体杂志,1998,23(03):36. |
| [5] | Ma honglei;Zhang Deheng .Large-scale flourine-doped textured transparent conducting SnO2 films deposited by APCVD[J].Proceedings of SPIE-The International Society for Optical Engineering,1996,2897(6-7):104-112. |
| [6] | S. Shanthi;C. Subramanian;P. Ramasamy .Growth and characterization of antimony doped tin oxide thin films[J].Journal of Crystal Growth,1999(4):858-864. |
| [7] | Alam MJ.;Cameron DC. .Characterization of transparent conductive ITO thin films deposited on titanium dioxide film by a sol-gel process[J].Surface & Coatings Technology,2001(0):776-780. |
| [8] | Quaas M.;Hippler R.;Wulff H.;Steffen H. .The growth process of plasma-deposited ITO films investigated by grazing incidence X-ray techniques[J].Surface Science: A Journal Devoted to the Physics and Chemistry of Interfaces,2000(0):790-795. |
| [9] | F.O. Adurodija;H. Izumi;T. Ishihara;H. Yoshioka;K. Yamada;H. Matsui;M. Motoyama .Highly conducting indium tin oxide (ITO) thin films deposited by pulsed laser ablation[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(12):79-84. |
| [10] | Seon-Soon Kim;Se-Young Choi;Chan-Gyung Park;Hyeon-Woo Jin .Transparent conductive ITO thin films through the sol-gel process using metal salts[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(12):155-160. |
| [11] | Annette Hultaker;Kenneth Jarrendahl;Jun Lu;Claes-Goran Granqvist;Gunnar A. Niklasson .Electrical and optical properties of sputter deposited tin doped indium oxide thin films with silver additive[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(2):305-310. |
| [12] | Tadatsugu Minami;Takashi Yamamoto;Yukinobu Toda;Toshihiro Miyata .Transparent conducting zinc-co-doped ITO films prepared by magnetron sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):189-194. |
| [13] | Yang Meng;Xi-liang Yang;Hua-xian Chen;Jie Shen;Yi-ming Jiang;Zhuang-jian Zhang;Zhong-yi Hua .A new transparent conductive thin film In{sub}2O{sub}3:Mo[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(1/2):219-223. |
| [14] | 范志新.AZO透明导电薄膜的特性、制备与应用[J].真空,2000(05):10. |
| [15] | Chang JF.;Hon MH.;Wang HL. .Studying of transparent conductive ZnO : Al thin films by RF reactive magnetron sputtering[J].Journal of Crystal Growth,2000(1/4):93-97. |
| [16] | Tadatsugu Minami;Shingo Suzuki;Toshihiro Miyata .Transparent conducting impurity-co-doped ZnO:Al thin films prepared by magnetron sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(0):53-58. |
| [17] | 丁星兆;何怡贞;董远达 .溶胶-凝胶工艺在材料科学中的应用[J].材料科学与工程,1994,12(02):1. |
| [18] | Al Dahoudi N;Bisht H .Transparent conducting,anti-static and anti-static-anti-glare coating on plastic substrates[J].Thin Solid Films,2001,392:299-304. |
| [19] | Kim H.;Horwitz JS.;Murata H.;Kafafi ZH.;Gilmore CM.;Chrisey DB.;Pique A. .Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(0):798-802. |
| [20] | Adurodija FO.;Ishihara T.;Yoshioka H.;Motoyama M.;Murai K.;Izumi H. .Effect of laser irradiation on the properties of indium tin oxide films deposited by pulsed laser deposition[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2001(1/2):114-121. |
| [21] | Reddy KTR.;Reddy TBS.;Forbes I.;Miles RW. .Highly oriented and conducting ZnO : Ga layers grown by chemical spray pyrolysis[J].Surface & Coatings Technology,2002(0):110-113. |
| [22] | 钟毅;王达健;刘荣佩 等.铟锡氧化物(ITO)靶材的应用和制备技术[J].昆明理工大学学报,1997,22(01):66. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%