介绍了强束流脉冲金属离子束技术的基本原理和主要优点,并用由金属蒸汽真空弧离子源(MEVVA)引出的强束流脉冲Ti、Mo、W、Ta、C离子对Cr12、H21、H13钢进行了离子注入材料改性试验.注入剂量为3×1017～5×1017cm-2,引出电压为25～48kV,平均束流为25～50μA/cm2.用卢瑟福背散射谱(RBS)测量了注入样品表面的成分,借助X射线行射仪(XRD)和X射线光电子能谱仪(XPS)考察了注入样品的耐磨机理.
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