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  4. 化学气相沉积金刚石薄膜刀具膜/基附着性能研究现状

表面技术 , 2006, 35(5): 54-59. doi: 10.3969/j.issn.1001-3660.2006.05.020

化学气相沉积金刚石薄膜刀具膜/基附着性能研究现状

龙剑平 1, , 汪灵 2, , 张湘辉 3, , 常嗣和 4,

1.成都理工大学材料与化学化工学院,四川,成都,610059;成都理工大学金刚石薄膜实验室,四川,成都,610059

2.成都理工大学材料与化学化工学院,四川,成都,610059;成都理工大学金刚石薄膜实验室,四川,成都,610059

3.成都理工大学材料与化学化工学院,四川,成都,610059;成都理工大学金刚石薄膜实验室,四川,成都,610059

4.成都理工大学材料与化学化工学院,四川,成都,610059

基金项目:   国家自然科学基金(40572030)   四川省教育厅资助项目(2003A142)   四川省科技攻关项目(05GG021-001)   成都理工大学校科研和教改项目(2004QJ03)  

关键词： 化学气相沉积 , 金刚石薄膜 , 硬质合金刀具 , 附着性能

Research Status on the Adhesion between Substrate and Diamond Film Deposited by CVD

CVD金刚石薄膜涂层刀具被认为是能最早实现CVD金刚石工业化应用的领域之一.目前,限制CVD金刚石薄膜涂层刀具产品大规模产业化应用的主要原因,是金刚石薄膜与硬质合金基底之间粘附性能较差.如何提高膜/基粘附性能,确保CVD金刚石薄膜涂层刀具优异性能的发挥、涂层刀具的使用寿命和加工性能,已成为材料科学工作者迫切需要解决的问题.介绍了影响CVD金刚石薄膜硬质合金刀具膜/基附着性能的主要因素、改善金刚石薄膜与硬质合金基体之间附着力的途径以及表征膜/基附着力的测试方法等方面的研究成果,并对提高低压气相金刚石薄膜硬质合金刀具膜/基附着性能的研究现状进行了分析.

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