在CVD涂层系统中,由于各种材料物理性能的差异,涂层在从沉积温度冷却到室温的过程中会产生热应力,影响膜基之间的附着力.为了考察各种因素对产生热应力的影响,利用热固耦合有限元方法分析了不同沉积条件下硬质合金基体上金刚石膜的热应力情况,还讨论了有不同过渡层的情况.对各情况下的轴向、径向和剪切应力做了比较分析.结果发现沉积温度和金刚石膜厚度对热应力影响较大,而过渡层厚度和物理性能对热应力影响不大.
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