采用溶胶-凝胶工艺在普通玻璃片上制备了掺铝氧化锌薄膜.通过X-射线衍射(XRD)、原子力显微镜(AFM)对薄膜的组织结构和形貌进行了表征,结果表明:用溶胶-凝胶法制得的掺铝氧化锌薄膜为纤锌矿型结构,呈c轴方向择优生长,表面均匀、致密.通过紫外-可见透射光谱(UV)和标准四探针法对薄膜的光电性能进行了研究.试验发现,当铝离子掺杂浓度为4%(摩尔分数)、溶胶物质的量浓度为0.6mol/L、前处理温度为300℃时,薄膜在可见光区的透过率超过80%,且具有较好的导电性,电阻率为8.0×10-4Ω·cm.
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