对薄膜涂层而言,硬度是定量分析其质量的基本指标.硬度的测试方法很多,所用测试方法不同,导致测试结果迥异.系统介绍了表面薄膜涂层硬度的几种测试方法,并对各方法的特点和适用范围进行了对比和评定.经对比可知:测试涂层的本征硬度,采用精确绘Meyer图,由公式法求得涂层本征硬度是最便捷、最准确、最科学的方法之一.
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