采用微波等离子体法,分别使用H和O等离子体对金刚石薄膜表面进行改性处理.通过扫描电子显微镜(SEM),原子力显微镜(AFM),X射线光电子能谱(XPS),并结合接触角随时间变化的曲线,初步评价了改性前后薄膜表面显微结构和成分的变化对亲水性的影响.结果表明:同一条件下制备的金刚石薄膜表面形貌、粗糙度差异不会影响表面亲水性;改性前金刚石薄膜亲水性差,H、O等离子体改性后薄膜表面接触角由原来的81°下降到20°以下,形成了亲水性良好的表面;暴露在空气中后,接触角在前3天的变化很大,这种变化与薄膜表面成分的改变密切相关.
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