为满足不同加工方式和加工条件下刀具对涂层的特殊要求,获得硬度高和耐摩擦性能优异的刀具涂层,采用反应磁控溅射方法制备了一系列不同碳含量的碳化铪薄膜.利用EDX,XRD,SEM,AFM和微力学探针表征了薄膜的微结构和力学性能,研究了C_2H_2分压(Ar和C_2H_2混合气体)对薄膜成分、相组成、微结构以及硬度和弹性模量的影响.结果表明,反应磁控溅射可以方便地制备碳化铪薄膜,但是,只有在C_2H_2分压为混合气体总压约3.0%附近很窄的范围内才可获得高硬度和高弹性模量的单相碳化铪薄膜,其最高硬度和弹性模量分别为27.9 GPa和255 GPa;低C_2H_2分压下所得薄膜由金属Hf和HfC两相组成,硬度较低;而过高的C_2H_2分压将导致薄膜形成非晶态,其硬度和弹性模量亦随之降低.
Hafnium carbide coatings with different carbon contents were synthesized in Ar-C_2H_2 mixture by reactive magnetron sputtering. Energy-dispersive X-ray, X-ray diffraction, scanning electron microscopy, atomic force microscopy and nanoindentation were employed to characterise their microstructure and mechanical properties. The effects of C_2H_2 partial pressure on the composition, phase, microstructure and mechanical properties of the coatings were investigated. The results show that hafnium carbide coatings can be synthesized at a low partial pressure of C_2H_2. The single phase HfC coating with columnar crystal and favorable mechanical properties could be obtained when the proportion of C_2H_2 partial pressure was only about 3.0% in the mixture, and the highest hardness and modulus were 27.9 GPa and 255 GPa respectively. The coating contains metal Hf and HfC phases and obtains low hardness under lower C_2H_2 partial pressure. When the C_2H_2 partial pressure is higher, the hardness and elastic modulus of acquired amorphous coatings decrease significantly.
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