采用微波等离子CVD方法在QCM传感器电极的表面沉积了一层超疏水性纳米膜(聚TMMOS有机硅氧烷),研究了其检测有机物的选择性和灵敏度.结果表明:改性的QCM电极表面选择性吸附有机物,而抑制了水分子的吸附;制得的超疏水性纳米膜的比表面积较大,使得有机物吸附量较大,提高了检测有机分子的灵敏度.该传感器能够应用于高湿度环境下有害有机物的检测.
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