采用波长为172 nm的紫外光使PET膜表面官能化,然后自组装APTES单分子膜(SAMs),再在真空条件下通过紫外光刻蚀对PET膜表面的SAMs进行微加工,最后进行选择性无电解镀铜处理.通过测量水接触角和XPS分析,表征了PET膜经各步处理后的表面状态,并观察了镀铜后的微铜图案.结果表明:紫外光照使PET基材表面改性,通过紫外光刻蚀技术,对SAMs的微加工可以控制铜在PET表面选择性沉积,从而一次性制备出保真性较好的微米级镀铜图案.
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