采用不同偏压,在201不锈钢表面进行多弧离子镀TiN薄膜,研究了偏压对薄膜表面形貌、硬度、相结构及耐蚀性的影响.研究表明:薄膜表面存在着许多液滴颗粒,随着偏压的增加,液滴减少,但过大的偏压会使表面出现凹坑；薄膜的显微硬度随偏压的升高先增大后减小,偏压为-200 V时的本征硬度为2 195HV；在3.5％的NaCl溶液中,TiN薄膜试样的耐蚀性比基体略有提高,在1 mol/L的H2SO4溶液中,偏压-100 V制备的试样耐蚀性最好,比基材提高了475倍.
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