采用氧气等离子体对聚酰亚胺薄膜进行表面处理,系统研究了等离子体处理时间、压强和功率对处理效果的影响,并对比了空气、氮气、氧气和氩气几种处理气氛的处理效果,得出了最佳处理条件.分析表明:聚酰亚胺薄膜经氧气等离子体处理后,表面引入了含氧极性基团,有明显的刻蚀现象,使得其亲水性增强,与铜箔复合的剥离强度提高.
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