综述了十多年来国内外激光诱导金属沉积技术的最新发展,主要介绍了激光诱导液相化学沉积以及固态膜法激光直接镀覆金属技术的实验体系、机理,以及激光光束的特性、材料的光学特性与温度特性对沉积过程的影响.并介绍了该技术在微电子领域的应用前景.
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