在电镀铜填充微盲孔的高酸、低铜酸性镀铜溶液中,以旋转圆盘电极为辅助,通过恒电流计时电位法对不同转速下,不同添加剂浓度的电镀铜溶液阴极电位及电位差的测定,研究了在高酸、低铜酸性镀铜溶液中通过电位差的大小来指导微盲孔填充的方法,发现该方法在对于高深径比的微盲孔填充时存在一定的局限性.通过改善电镀参数实现了对d为100 μm,深度为100 μm的微盲孔的完全填充.
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