用无机盐替代锆的醇盐,通过Sol-Gel方法,合成均匀、稳定的PZT溶胶.采用Pt/Ti/SiO2/Si基片并加入PT过渡层,经快速热处理,制备出沿(100)高度定向的PZT陶瓷薄膜,此薄膜具有良好的铁电性能.
参考文献
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