提出了采用毫牛力学探针技术对硬质薄膜的硬度和弹性模量等力学性能进行准确测量的两步压入法,并用此方法研究了(Ti,Al)N/AlN纳米多层膜的硬度和调制周期之间的关系.结果表明,该纳米多层膜体系的硬度和弹性模量随调制周期的减小单调增加, 并在调制周期为1.3nm时达到最高值HV=29.0GPa和E=383.0GPa,表明(Ti,Al)N/AlN纳米多层膜存在超硬度和超模量效应.
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