SiC陶瓷材料具有许多优异的性能如高比强度、高比模量、低密度、高硬度、高导热系数、低的热膨胀系数、耐腐蚀、抗氧化等,从而被广泛用作高温结构部件.CVD 工艺灵活,制备的SiC陶瓷具有很高纯度和致密度,因而是制备先进SiC陶瓷的最有希望的工艺之一.对CVD法制备SiC涂层和SiC基复合材料的研究及应用进行了综述.
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