以TbDyFe磁致伸缩薄膜悬臂梁为研究对象,采用有限元分析方法(FEM)对薄膜厚度及薄膜与衬底材料的弹性模量比对悬臂梁最大挠度值的影响规律进行了研究.通过FEM计算发现:当薄膜厚度小于衬底厚度的十分之一时,最大挠度值随薄膜厚度线性增加,计算结果与文献的理论计算结果吻合很好;当薄膜厚度为衬底厚度的一半时,悬臂梁的自由端挠度值达到最大.磁性薄膜与衬底材料有效弹性膜量比值的增加可以显著地提高悬臂梁的挠度值,同时挠度最大值向薄膜/衬底厚度比减少的方向移动.
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