采用二次氧化的方法,在短时间内制备了多孔阳极氧化铝薄膜(Anodic Alumina Membrane, 简称AAM),借助扫描电子显微镜(SEM),能谱分析(EDS)和X射线衍射(XRD)等测试手段分析了氧化铝膜的微观形貌和晶体结构,讨论了电解液温度波动和铝材表面缺陷对AAM表面形貌的影响.研究结果表明:制备的多孔氧化铝薄膜是非晶态氧化铝,在其表面孔径为50～70 nm的六边形孔洞分布均匀,且垂直于薄膜表面平行生长.氧化过程中,电解液温度的稳定有利于形成规则的孔洞阵列;通过电化学抛光预处理,可有效去除机械划痕,避免薄膜表面沟壑状形貌的形成,提高了孔洞分布的均匀性.
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