综述了透明导电氧化物(TCO)薄膜的特性、应用及制备技术的发展,重点讨论了磁控溅射、脉冲激光沉积、溶胶-凝胶、喷射热分解等制备技术和柔性衬底TCO薄膜的制备状况、进展及发展趋势,并指出改进TCO薄膜制备技术的努力方向应体现完善薄膜性能、降低反应温度、提高控制精度、降低制备成本和适应集成化等趋势,而制备方法的选择则应根据薄膜的性能要求和不同的应用目的而不同.
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