用磁控溅射法在1Cr18Ni9Ti不锈钢上沉积了TiB2和Ti-B-N涂层.用场发射电子扫描显微镜(FESEM)和小掠射角X射线衍射(GAXRD)研究了涂层的结构与形貌,并对涂层的显微硬度进行了检测分析.研究表明:通入N2后,Ti-B-N涂层变得更为光滑平整,涂层结构由纳米柱状晶转为非晶结构,显微硬度降低.在室温无润滑条件下,检测了涂层的耐磨性能,结果表明Ti-B-N涂层的摩擦系数低于TiB2涂层,但涂层的耐磨性并没有得到提高.
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