在位反应制备TiC涂层的动力学研究

1.中国科学院,山西煤炭化学研究所炭材料重点实验室,太原,030001;中国科学院研究生院,北京,100039

2.中国科学院,山西煤炭化学研究所炭材料重点实验室,太原,030001

3.中国科学院,山西煤炭化学研究所炭材料重点实验室,太原,030001

4.中国科学院,山西煤炭化学研究所炭材料重点实验室,太原,030001

Study on Kinetic Properties of TiC Coatings Prepared by in-Situ Reaction

以TiCl4(99.9%)为钛源,H2(99.99%)为载气和反应气体,Ar(99.99%)为保护和稀释气,石墨为基体和碳源,在位反应制备了TiC涂层.通过实验参数与沉积产物的重量变化,分析了该反应的控制因素,并研究了反应的动力学特点.

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