介绍了一种制备具有低介电常数氧化硅分子筛薄膜的新方法.以正硅酸乙酯为硅源,四丙基氢氧化铵(TPAOH)为模板剂和碱源,采取水热晶化技术,通过原位法在硅晶片表面制备出纯二氧化硅透明分子筛薄膜;采用紫外光解法脱除分子筛薄膜孔道内的模板剂,制备出具有低介电性能的氧化硅分子筛薄膜.使用FT-IR,XRD和SEM对样品进行了结构表征,并采用阻抗分析仪测量了薄膜的介电常数,采用纳米硬度计测量薄膜的弹性模量和硬度.
参考文献
| [1] | CHEN S J;EVANS D F;NINHAM B M .Properties and structure of three-component ionic microemulsions[J].Physical Chemistry,1984,88:1631-1637. |
| [2] | BANERJEE K;AMERASEKERA A;DIXI G.[A].San Francisco:Technical Degest,1996:65-68. |
| [3] | BHAM M K;HUANG J;CHENG D .Deposition of stable,low κ and high deposition rate SiF4-doped TEOS fluornated silicon dioxide(SiOF)films[J].Thin Solid Films,1997,306-309:507-511. |
| [4] | Kazuhiko Endo;Toru Tatsumi .Plasma fluorination of polyimide thin films[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,1997(6):3134-3137. |
| [5] | HOMMA T .LoW dielectric constant materials and methods for interlayer dielectric films in ultralarge-scale integrated circuit multilevel intereonneetions[J].Materials Science and Engineering,1998,23(06):243-285. |
| [6] | 吴广明,沈军,王珏,周斌,倪星元.溶胶凝胶制备纳米多孔SiO2光学增透薄膜耐磨特性强化研究[J].原子能科学技术,2002(04):374-379. |
| [7] | 王娟,张长瑞,冯坚.三甲基氯硅烷对纳米多孔二氧化硅薄膜的修饰[J].物理化学学报,2004(12):1399-1403. |
| [8] | BEIN T .Synesis and application of molecular Sieve layers and membranes[J].Chemistry of Materials,1996,8:1636-1643. |
| [9] | OZIN G;KUPERMAN A;STEIN A .Advanced zeolite materials science angew[J].Angewandte Chemie(International Edition in English),1998,28:359-362. |
| [10] | STUCKY G D;MAcKOUGALL J E .Quantum confinement and host/guest chemistry[J].Probing a New Dimension Scinec,1990,247:669-673. |
| [11] | PERSSON A E;SCHOEMAN B J;STERTE J et al.The synthesis of discrete collodial particles of TPA-silicalite[J].Zeolites,1994,14:557-561. |
| [12] | KEM W;PUOTINEN D A .Cleaning solutions bar on hydrogen peroxide for use in silicon semiconductor technology[J].RCA Review,1970,31:187-194. |
| [13] | VOUDURIER G;NACCACHE C;VEDRINE J C .Uses of IR spectroscopy in identilying ZSM zeolite structure[J].Journal of the Chemical Society,Chemical Communications,1982,24:1413-1415. |
| [14] | YAN Y;DAVIS M E;GAVALAS G R .Preparation of zeolite ZSM-5 membranes by in-situ crystallization on porous[J].Alpha-Al Industrial and Engineering Chemistry Research,1995,34:1652-1663. |
| [15] | FLANIGENE M;BENNETT J M;GROSE R W et al.Silicalite,a new hydrophobie crystalline silica molecular sieve[J].Nature,1978,271:512-515. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%