研制了一种压电弯曲元件型压电驱动器,该驱动器用于电液伺服阀的电-机械转换器.压电驱动器由三层结构构建,其中中间弹性层为铍青铜,在铍青铜的上下表面各粘接一片压电晶片,材料为PZT-5H.利用激光测微仪LC-2400A及LV-1610对压电驱动器的输出位移、位移滞环及谐振频率进行了实验测量,分析了压电驱动器尺寸与其特性之间的关系.实验结果表明,该驱动器满足所设计电液伺服阀的性能要求.
Developed a new type of piezoelectric bending actuator used as electrics-to-mechanics converter of a piezoelectric hydroelectric servo-valve.This actuator is with three-ply structure.Be-Cu is chosen for the elastic interlayer,and PZT-5H as piezoelectric layers bonded to both sides of the elastic layer.The experimental performance of piezoelectric bending actuator including the outputting deflection,the deflection hysteresis loop,and the resonance frequency are investigated by laser distance measuring instrument LC-2400A and LV-1610.The dimensions-characteristics of the piezoelectric bending actuator relationships are analyzed.The results show that the actuator can meet the need of the piezoelectric servo-valve.
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